Computer simulation of anisotropic crystal etching
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978
- Correlation of the anisotropic etching of single−crystal silicon spheres and wafersJournal of Applied Physics, 1975
- Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolutionJournal of Materials Science, 1973
- Anisotropic Etching of SiliconJournal of Applied Physics, 1969