Microtexture Measurements of Aluminum VLSI Metallization
- 1 January 1995
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Electromigration Lifetimes of Single Crystal Aluminum Lines with Different Crystallographic OrientationsMRS Proceedings, 1994
- The Role of Texture On The Reliability Of Aluminum Based InterconnectsMRS Proceedings, 1993
- Effect of Line Width on Electromigration of Textured Pure Aluminum FilmsMRS Proceedings, 1993