Ba1−xSrxTiO3 Thin Film Sputter-Growth Processes and Electrical Property Relationships for High Frequency Devices
- 1 January 1999
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Ferroelectricity in thin films: The dielectric response of fiber-textured (BaxSr1−x)Ti1+yO3+z thin films grown by chemical vapor depositionJournal of Applied Physics, 1999
- Microwave properties of ferroelectric thin filmsIntegrated Ferroelectrics, 1998
- Tunable microwave components for Ku-and K-band satellite communicationsIntegrated Ferroelectrics, 1998
- Dielectric relaxation of Ba0.7Sr0.3TiO3 thin films from 1 mHz to 20 GHzApplied Physics Letters, 1998
- Stoichiometric Effects of Sputtered Barium Strontium Titanate FilmsMRS Proceedings, 1997
- (Ba+Sr)/Ti ratio dependence of the dielectric properties for (Ba0.5Sr0.5)TiO3 thin films prepared by ion beam sputteringApplied Physics Letters, 1994
- Sputtering of multicomponent materialsJournal of Vacuum Science & Technology A, 1983