Polysilicon surface-modification technique to reduce sticking of microstructures
- 30 April 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 52 (1-3) , 145-150
- https://doi.org/10.1016/0924-4247(96)80140-3
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- The Novel Capacitor Structure with Polysilicon Grain Hole for Advanced Dynamic Random Access MemoryJapanese Journal of Applied Physics, 1994
- Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theoryJournal of Microelectromechanical Systems, 1993