Growth of boron nitride thin films by metal-organic chemical vapour deposition
- 1 March 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 258 (1-2) , 21-25
- https://doi.org/10.1016/0040-6090(94)06335-4
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- Thin films of boron nitride grown by CVDBulletin of Materials Science, 1994
- Growth of BN by hot filament assisted electron beam depositionJournal of Physics D: Applied Physics, 1993
- Boron nitride thin films on Si(100) by metal organic chemical vapour depositionSolid State Communications, 1993
- Current Issues and Problems in the Chemical Vapor Deposition of DiamondScience, 1990
- Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4Surface and Coatings Technology, 1989
- Radio frequency sputter deposited boron nitride filmsJournal of Vacuum Science & Technology A, 1984
- Ion beam synthesis of cubic boron nitrideJournal of Vacuum Science & Technology A, 1983
- Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam BombardmentJapanese Journal of Applied Physics, 1983
- Chemical vapour deposition of thin films of BN onto fused silica and sapphireThin Solid Films, 1981
- Hydrides of Boron. VI. The Action of Ammonia on the Methyl DiboranesJournal of the American Chemical Society, 1936