Efficient extraction window for high-throughput x-ray lithography beamlines

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Abstract
An x‐ray extraction setup with a double‐window configuration (diamond and beryllium windows) is investigated for x‐ray lithography beamlines using synchrotron radiation (SR) sources. A cylindrical frame for holding the Be foil greatly reduces the film thickness required to withstand the atmospheric helium pressure, but Be foil is subject to plastic deformation at temperatures above 250 °C. A thermal shield is therefore required upstream from the Be window. Testing the combination of a 1‐μm‐thick diamond film as the thermal shield and a 15‐μm‐thick Be foil as the vacuum separation window confirmed the excellent performance of this double‐window setup even when the irradiation power was 8 W/cm2, which corresponds to a 500 mA storage current in the NTT SR ring (Super‐ALIS: critical wavelength=17.3 Å).

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