Dual Ion-Beam Deposition of Superconducting NbN Films
- 1 January 1986
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Synthesis of compound thin films by dual ion beam deposition. I. Experimental approachJournal of Applied Physics, 1985
- NbN tunnel junctionsIEEE Transactions on Magnetics, 1985
- Niobium nitride thin films for use in Josephson junctionsIEEE Transactions on Magnetics, 1985
- Tunneling, resistive and structural study of NbN and other superconducting nitridesIEEE Transactions on Magnetics, 1985
- The upper critical field of NbN films. IIJournal of Applied Physics, 1984
- Properties of NbN thin films deposited on ambient temperature substratesJournal of Applied Physics, 1983
- Ion-beam deposition of Nb and Ta refractory superconducting filmsJournal of Vacuum Science & Technology A, 1983
- Modification of niobium film stress by low-energy ion bombardment during depositionJournal of Vacuum Science and Technology, 1982
- Nitride film deposition by reactive ion beam sputteringThin Solid Films, 1980
- Reactive film preparationThin Solid Films, 1976