Grating-coupler based low-loss optical interlayer coupling
- 1 September 2011
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 19492081,p. 383-385
- https://doi.org/10.1109/group4.2011.6053824
Abstract
Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of <;0.1dB.Keywords
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