Problem-oriented modeling of microtransducers: State of the art and future challenges
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 279-283
- https://doi.org/10.1016/0924-4247(94)80124-x
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- ASEP: a CAD program for silicon anisotropic etchingSensors and Actuators A: Physical, 1991