A humidity-sensing model for metal–insulator–semiconductor capacitors with porous ceramic film
Open Access
- 31 May 2000
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 87 (12) , 8716-8720
- https://doi.org/10.1063/1.373601
Abstract
A new physical model for a humidity-sensitive metal–insulator–semiconductor (MIS) capacitor with porous thin film is proposed. The model is used to determine water adsorption isotherm and calculate pore-size distribution of the film. The relative-humidity dependences of the capacitance and resistance of the film were measured. The effects of frequency on the dielectric constant of the film and the current of the MIS structure under various relative humidities were investigated.This publication has 17 references indexed in Scilit:
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