Perspectives on MEMS in bioengineering: a novel capacitive position microsensor [and laser surgery and drug delivery applications]
- 1 January 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. 47 (1) , 8-11
- https://doi.org/10.1109/10.817612
Abstract
We describe a novel capacitive position sensor using micromachining to achieve high sensitivity and large range of motion. These sensors require a new theoretical framework to describe and optimize their performance. Employing a complete description of the electrical fields, the sensor should deviate from the standard geometries used for capacitive sensors. By this optimization, the sensor gains a twofold increase in sensitivity. Results on a PC board 10x model imply that the micromachined sensor should achieve a sensitivity of less than 10 nm over 500-micron range of travel. Some bioengineering applications are addressed, including positioning of micromirrors for laser surgery and dose control for implantable drug delivery systems.Keywords
This publication has 2 references indexed in Scilit:
- Electrostatic surface drives: theoretical considerations and fabricationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Recent progress in micromachining technology and application in implantable biomedical systemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002