Electrostatic surface drives: theoretical considerations and fabrication
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 41-44
- https://doi.org/10.1109/sensor.1997.613576
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A RIE process for submicron, silicon electromechanical structuresJournal of Micromechanics and Microengineering, 1992
- A proposal for electrically levitating micromotorsSensors and Actuators A: Physical, 1990
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987