A low cost laser interferometer system for machine tool applications
- 1 January 1983
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 5 (1) , 29-31
- https://doi.org/10.1016/0141-6359(83)90069-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Design and construction of a large grating ruling enginePrecision Engineering, 1981
- Gratings or lasers?Precision Engineering, 1980
- Very Stable Common-Path Interferometers and ApplicationsJournal of the Optical Society of America, 1963
- The measurement of thin films by interferometryPhysica, 1958