Monte Carlo Modeling of Ion Transport Througe RF Glow Discharge Sheaths
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
The transport of ions through a rf-plasma sheath was simulated using a Monte Carlo method to determine the distribution of ion bombardment energy and impingement angle.Several types of ion-molecule interactions were tested to determine their effect on the distributions: elastic hard-sphere scattering, elastic potential-field interactions (based upon reported literature values obtained by drift tube measures), and charge transfer.The type of elastic scattering does not significantly change the angular distributions; however, the scattering cross-sections changes as a function of ion energy (or sheath E/P) for the potential-field interactions.The fraction of collisions giving charge exchange makes a large difference in the simulated directionality as well as a factor of two difference in the average bombardment energy.Keywords
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