An efficient methodology for building macromodels of IC fabrication processes

1 December 1989

journal article
research article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Vol. 8 (12) , 1299-1313
https://doi.org/10.1109/43.44510

Abstract

An efficient macromodeling approach for statistical IC process design based on experimental design and regression analysis is described. Automatic selection of the input variables is done as part of the model-building procedure to reduce the problem dimension to a manageable size. The resulting macromodels are simple analytical expressions describing the device characteristics in terms of the fundamental process variables. The validity and efficiency of the macromodels obtained by the approach are illustrated through their use in an IC process design centering example. Although the approach has only been applied to the IC fabrication process level, the underlying methodology can also be used to obtain circuit-level macromodels.

Keywords

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