Soft x-ray microscope at the undulator beamline of the Photon Factory
- 1 July 1989
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 60 (7) , 2448-2451
- https://doi.org/10.1063/1.1140695
Abstract
A soft x‐ray microscope using Fresnel zone plates as optical imaging elements was installed at the Photon Factory. It makes use of undulator radiation as a source of soft x rays ranging from 2.0 to 3.0 nm in wavelength. The optical system was designed to match to the undulator radiation. A performance test was made at 2.66 nm by various pitches of transmission gratings. Those magnified images were taken with a magnification of 230 and exposure times of about 10 s. The modulation transfer function was measured over the spatial frequency up to 3300 lp/mm. Further, magnified images of some biological specimens were obtained.Keywords
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