Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
- 1 August 1996
- journal article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 45 (2) , 155-158
- https://doi.org/10.1016/0254-0584(96)80094-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Preparation of Pb(Zr, Ti)O3 Thin Films by Multi-Target SputteringJapanese Journal of Applied Physics, 1993
- Metal Complexes for Preparing Ferroelectric Thin Films by Metalorganic Chemical Vapor DepositionJapanese Journal of Applied Physics, 1992
- Piezoelectric Properties of Lead Zirconate-Lead Titanate Solid-Solution CeramicsJournal of Applied Physics, 1954