Superconducting properties of CVD tantalum films
- 31 December 1987
- journal article
- Published by Elsevier in Materials Letters
- Vol. 6 (3) , 58-61
- https://doi.org/10.1016/0167-577x(87)90032-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Tantalum and Tantalum Compounds in Thin Film MicrocircuitryJournal of The Electrochemical Society of Japan, 1966
- Size Effects in Thin Films ofGe, Nb, and TaPhysical Review B, 1964
- The Magnetic Behavior of Superconductors of Negative Surface EnergyIBM Journal of Research and Development, 1962
- The Deposition of Tantalum and Columbium from their Volatilized HalidesJournal of the Electrochemical Society, 1948