Nitridation of high-purity single-crystal silicon
- 1 May 1982
- journal article
- Published by Elsevier in Metallography
- Vol. 15 (2) , 157-162
- https://doi.org/10.1016/0026-0800(82)90019-2
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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