Nitridation of High‐Purity Silicon
- 1 July 1976
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 59 (7-8) , 285-289
- https://doi.org/10.1111/j.1151-2916.1976.tb10966.x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A mechanism for the nitridation of silicon powder compactsJournal of Materials Science, 1974
- Conversion of Si to epitaxial SiC by reaction with C2H2Journal of Applied Physics, 1974
- Kinetics of Nitridation of Si Powder CompactsJournal of the American Ceramic Society, 1973
- DENSE SILICON NITRIDEPowder Metallurgy, 1961