The construction and uses of an efficient backscattered electron detector for scanning electron microscopy
- 1 August 1974
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 7 (8) , 650-652
- https://doi.org/10.1088/0022-3735/7/8/019
Abstract
The design features of an efficient geometric backscattered electron detector are presented. This detector appears to have approximately the same limit of spatial detectability as a secondary electron detector. It has the advantages over a secondary electron detector of a reduction of charging artefacts, improved flat surface contrast and reduced edge highlighting.Keywords
This publication has 2 references indexed in Scilit:
- Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)Applied Physics Letters, 1973
- Factors Affecting Contrast and Resolution in the Scanning Electron Microscope†Journal of Electronics and Control, 1959