CO2 laser cleaning of black deposits formed during the excimer laser etching of polyimide in air
- 1 January 1988
- journal article
- research article
- Published by Springer Nature in Applied Physics B Laser and Optics
- Vol. 45 (1) , 45-46
- https://doi.org/10.1007/bf00692340
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Observation of shock waves and cooling waves in the laser ablation of Kapton films in airApplied Physics Letters, 1987
- Laser ablation of polymers in pressurized gas ambientsApplied Physics B Laser and Optics, 1987
- Pulsed CO2 laser etching of polyimideApplied Physics Letters, 1986
- Excimer laser etching of polyimideJournal of Applied Physics, 1985
- CO2 laser assisted UV ablative photoetching of Kapton filmsApplied Physics Letters, 1984