Subμm registration of fiducial marks using machine vision
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 16 (8) , 791-794
- https://doi.org/10.1109/34.308473
Abstract
Sub/spl mu/m registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies.Keywords
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