Effect of growth conditions on formation of TiO2-II thin films in atomic layer deposition process
- 1 November 1997
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 181 (3) , 259-264
- https://doi.org/10.1016/s0022-0248(97)00279-0
Abstract
No abstract availableKeywords
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