Determination of the activation energy for the heterogeneous nucleation of misfit dislocations in Si1−xGex/Si deposited by selective epitaxy
- 20 January 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 70 (3) , 324-326
- https://doi.org/10.1063/1.118404
Abstract
No abstract availableKeywords
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