Process Techniques of 15-inch Full-Color High-Resolution Liquid Crystal Displays Addressed by a-Si Thin Film Transistors
- 1 December 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (12S)
- https://doi.org/10.1143/jjap.31.4574
Abstract
A 15 inch-diagonal-size full-color liquid crystal display (LCD) with 1152(×3)×900 pixels has been fabricated which enables a portable workstation with improved display performances. The process techniques used for this development are described, with special reference to metallization and dry etching. In multilevel metallization, Cr/Al interconnection is metallurgically undesirable. By contrast, the Cr/Ti/Al metal system provides excellent properties of contact resistivity and thermodynamical stability. Dry etching processes are developed for multilayered insulating films and metallization-related bilayers, namely SiO2/TaO x /SiN x /(i/n+)a-Si and a-Si/Ti, respectively. Fine patterning and easier stepcoverage of subsequently deposited layers are achieved.Keywords
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