Annealing Behavior of Amorphous C:H Films Prepared by Glow Discharge Decomposition of CH4 and H2

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Abstract
Hydrogenated amorphous carbon films with high contents of sp3 bonds have been prepared by a glow-discharge-decomposition of CH4 and H2 mixture. The film thickness and the optical gap of the films were gradually reduce up to annealing at 350°C by the densification of the film; they rapidly reduce above 350°C. The hydrogen density in the films, however, was almost constant. From the variation of mass spectra with annealing, the decomposition of the films was found to begin at 350°C, accompanied by a volatilization of various forms of hydrocarbon such as CH n , C2H n and C3H n .