Strain in Thin Metal Films on Quartz

Abstract
From x‐ray diffraction intensity measurements it is possible to evaluate strain gradient in a single crystal. Transmission diffraction techniques were applied to investigate strain in the film evaporated on a quartz plate. Topographs showed qualitatively the locations of high strain gradient. Quantitative measurements were made through the thickness of the plate with a narrow well‐collimated x‐ray beam and a scintillation counter. It was found that the strain gradient was high at the film edge on the surface of the crystal plate.

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