Deuterium in germanium: Interaction with point defects
- 15 March 1984
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 55 (6) , 1464-1471
- https://doi.org/10.1063/1.333402
Abstract
Electrical measurements on deuterium plasma-treated germanium samples containing deep level recombination centers show significant neutralization of these defects to depths of ∼80 μm. Chemical measurement of the deuterium profile after similar plasma treatment shows apparent incorporation depths of ∼0.2 μm. We discuss experiments which resolve this discrepancy, and show that hydrogen diffusion into the bulk of the germanium is responsible for the observed neutralization.This publication has 26 references indexed in Scilit:
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