Ferroelectric characterization of highly (0001)-oriented YMnO3 thin films grown by chemical solution deposition
- 17 August 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (7) , 903-905
- https://doi.org/10.1063/1.122443
Abstract
Highly (0001)-oriented thin films of YMnO3 were grown directly on Si substrates by chemical solution deposition. The crystallinity of the films was investigated by using x-ray diffraction: θ–2θ scan, rocking curve, and pole figure. Analysis of the x-ray photoelectron spectroscopy data and Rutherford backscattering spectroscopy spectrum showed that the films had a single phase of stoichiometric YMnO3. The ferroelectric properties of YMnO3 were investigated by measuring the temperature dependence of the capacitance–voltage characteristics in the metal/ferroelectric/semiconductor structure. Screening of the ferroelectricity of YMnO3 thin film at room temperature was discussed in conjunction with the charge effects.Keywords
This publication has 10 references indexed in Scilit:
- Capacitance–voltage characteristics of Bi4Ti3O12/p-Si interfaceApplied Physics Letters, 1998
- Memory window of Pt/SrBi2Ta2O9/CeO2/SiO2/Si structure for metal ferroelectric insulator semiconductor field effect transistorApplied Physics Letters, 1997
- YMnO3 Thin Films Prepared from Solutions for Non Volatile Memory DevicesJapanese Journal of Applied Physics, 1997
- Fabrication of YMnO3 Thin Films on Si Substrates by a Pulsed Laser Deposition MethodJapanese Journal of Applied Physics, 1997
- Depletion-type thin-film transistors with a ferroelectric insulatorApplied Physics Letters, 1997
- Oriented growth of SrBi2Ta2O9 ferroelectric thin filmsApplied Physics Letters, 1996
- Epitaxially grown YMnO3 film: New candidate for nonvolatile memory devicesApplied Physics Letters, 1996
- Electronic structure of studied by photoemission and x-ray-absorption spectroscopyPhysical Review B, 1995
- Texture analysis of smooth i n s i t u laser ablated YBa2Cu3O7 thin films on (100) SrTiO3Journal of Applied Physics, 1990
- Depolarization-Field-Induced Instability in Thin Ferroelectric Films—Experiment and TheoryPhysical Review B, 1973