Correlation of process and system parameters with structure and properties of physically vapour- deposited hard coatings
- 29 February 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 157 (2) , 195-222
- https://doi.org/10.1016/0040-6090(88)90004-1
Abstract
No abstract availableKeywords
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