Capacitive sensors in CMOS technology with polymer coating
- 1 April 1995
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 25 (1-3) , 357-361
- https://doi.org/10.1016/0925-4005(95)85080-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
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- Selective detection of organic molecules with polymers and supramolecular compounds: application of capacitance, quartz microbalance and calorimetric transducersSensors and Actuators A: Physical, 1992
- Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimideSensors and Actuators A: Physical, 1991