Patterned sputter deposited SmCo-films for MEMS applications
- 1 April 2002
- journal article
- Published by Elsevier in Journal of Magnetism and Magnetic Materials
- Vol. 242-245, 1146-1148
- https://doi.org/10.1016/s0304-8853(01)01304-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Single- and multi-layer electroplated microaccelerometersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Ion beam deposition of permanent magnet layers for liftoff processesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Coercivity analysis in sputtered Sm–Co thin filmsJournal of Applied Physics, 1999