Molecular dynamics simulation of preferential sputtering from isotopic mixtures
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 40-41, 270-274
- https://doi.org/10.1016/0168-583x(89)90976-2
Abstract
No abstract availableKeywords
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- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969