Chemical vapor deposition of the superconducting YBa2Cu3O7−x phase using halides as metal sources

12 June 1989

journal article
Published by AIP Publishing in Applied Physics Letters

Vol. 54 (24) , 2476-2478
https://doi.org/10.1063/1.101540

Abstract

It is shown for the first time that the superconducting YBa2Cu3O7−x phase can be deposited by chemical vapor deposition using the halide precursors YCl3, BaI2, and CuCl as metal sources and an O2/H2O gas mixture. Sintered calcium stabilized zirconia plates were used as substrates. The superconductor was obtained upon deposition without the need for post-annealing. An ideal (001) texture was always found to prevail.

Keywords

This publication has 5 references indexed in Scilit:

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