Indium tin oxide overlayered waveguides for sensor applications
- 20 September 1997
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 36 (27) , 7066-7072
- https://doi.org/10.1364/ao.36.007066
Abstract
The use of indium tin oxide (ITO) thin films as electrodes for integrated optical electrochemical sensor devices is discussed. The effect of various thicknesses of ITO overlayers exhibiting low resistivity and high transparency on potassium ion-exchanged waveguides fabricated in glass substrates is investigated over the wavelength range 500–900 nm. ITO overlayers are formed by reactive thermal evaporation in oxygen, followed by annealing in air to a maximum temperature of 320 °C. With air as the superstrate, losses in the waveguides were found to increase dramatically above 30-nm ITO thickness for TE polarization and above 50-nm thickness for TM. Losses were increased over the whole wavelength range for a superstrate index close to that of water. A one-dimensional, multilayer waveguide model is used in the interpretation of the experimental results.Keywords
This publication has 28 references indexed in Scilit:
- Detection of glucose via electrochemiluminescence in a thin-layer cell with a planar optical waveguideMeasurement Science and Technology, 1995
- Electrochemically-controlled waveguide-coupled surface plasmon sensingJournal of Electroanalytical Chemistry, 1995
- Mode-independent attenuation in evanescent-field sensorsApplied Optics, 1995
- Transducer aspects of biosensorsBiosensors and Bioelectronics, 1994
- Biosensors using integrated optical devicesAnalytical and Bioanalytical Chemistry, 1993
- Optoelectrochemical transduction on planar optical waveguidesJournal of Lightwave Technology, 1992
- Integrated opto-chemical sensorsSensors and Actuators B: Chemical, 1992
- Direct optical immunosensing (sensitivity and selectivity)Sensors and Actuators B: Chemical, 1992
- A planar indium phosphate monomode waveguide evanescent field immunosensorSensors and Actuators B: Chemical, 1990
- An application of optical waveguides to electrochemistry: construction of optical waveguide electrodesThe Journal of Physical Chemistry, 1988