Software tools for designers of sensor and actuator CAE systems
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A CAD architecture for microelectromechanical systemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Automatic generation of a 3-D solid model of a microfabricated structurePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Pressure sensor design and simulation using the CAEMENS-DPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- The Finite‐Element Method for MicrosensorsJournal of the Electrochemical Society, 1987
- SENSIM: A simulation program for solid-state pressure sensorsIEEE Transactions on Electron Devices, 1982