A fast optical profilometer
- 1 June 1983
- journal article
- Published by Elsevier in Optics Communications
- Vol. 46 (1) , 1-3
- https://doi.org/10.1016/0030-4018(83)90018-4
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- A fast versatile optical profilometerOptics Communications, 1979
- Optical Profile TransducerOptical Engineering, 1979
- A Scanning Gauge for Measuring the Form of Spherical and Aspherical SurfacesOptica Acta: International Journal of Optics, 1978
- Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometerApplied Optics, 1976
- Real-time measurement of surface roughness by correlation of speckle patternsJournal of the Optical Society of America, 1976