Enhanced sensitivity and depth resolution of oxygen detection combining resonance scattering and tilted target methods
- 1 April 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 180 (2-3) , 619-623
- https://doi.org/10.1016/0029-554x(81)90107-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A comparison of techniques for depth profiling oxygen in siliconNuclear Instruments and Methods, 1979
- On the determination of optimum depth-resolution conditions for rutherford backscattering analysisNuclear Instruments and Methods, 1978
- Line-shape extraction analysis of silicon oxide layers on silicon by channelling effect measurementsThin Solid Films, 1973