A finite element method for determining structural displacements resulting from electrostatic forces
- 2 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A finite element approach has been developed to help solve the problem of structural displacement due to forces from electrostatic attraction. The method can be applied to typical MEMS structures such as diaphragms, beams, etc. where the charge carrying surfaces can be approximated as nearly parallel. The user subroutine capability of the commercially available ABAQUS finite element code is used. This capability allows a non-uniform, position dependent, load to be applied at each integration point during the stress/displacement analysis. The load value is determined by a user written FORTRAN subroutine.Keywords
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