Analytical modeling of electrostatic membrane actuator for micro pumps
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 8 (3) , 335-345
- https://doi.org/10.1109/84.788638
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Pumping gases by a silicon micro pump with dynamic passive valvesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A Finite-Element / Boundary-Element Method for the Simulation of Coupled Electrostatic-Mechanical SystemsJournal de Physique III, 1997
- Planarity of large MEMSJournal of Microelectromechanical Systems, 1996
- A micro membrane pump with electrostatic actuationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988
- Plastic deformation in polyimides, with new implications on the theory of plastic deformation of glassy polymersPhilosophical Magazine, 1977