Polysilicon gate depletion effect on IC performance
- 30 November 1995
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 38 (11) , 1975-1977
- https://doi.org/10.1016/0038-1101(95)00108-6
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- An analytic polysilicon depletion effect model for MOSFETsIEEE Electron Device Letters, 1994
- Investigation of the physical modeling of the gate-depletion effectIEEE Transactions on Electron Devices, 1992
- A study on the physical mechanism in the recovery of gate capacitance to C/sub ox/ in implanted polysilicon MOS structuresIEEE Electron Device Letters, 1992