Simultaneous growth of rhombohedral and amorphous boron films in a low pressure B2H6+H2+He plasma
- 1 July 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 89 (4) , 560-570
- https://doi.org/10.1016/0022-0248(88)90219-9
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Synthesis of diamond films in a rf induction thermal plasmaApplied Physics Letters, 1987
- Chemical vapour deposition of diamond in RF glow dischargeJournal of Materials Science Letters, 1985
- Direct verification of hydrogen termination of the semiconducting diamond(111) surfaceJournal of Vacuum Science and Technology, 1982
- Theoretical analysis of equilibrium adsorption layers in CVD systems (Si-H-Cl, Ga-As-H-Cl)Journal of Crystal Growth, 1978