Theoretical analysis of equilibrium adsorption layers in CVD systems (Si-H-Cl, Ga-As-H-Cl)
- 1 December 1978
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 45, 73-81
- https://doi.org/10.1016/0022-0248(78)90417-7
Abstract
No abstract availableKeywords
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