Electrical Parameter Sensitivity of Deep Submicron and Micron MOSFET Devices with Variation in Processing Conditions

Publisher Website

1 January 1993

book chapter
Published by Springer Nature

p. 225-228
https://doi.org/10.1007/978-3-7091-6657-4_55

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Design and experimental technology for 0.1-µm gate-length low-temperature operation FET's
IEEE Electron Device Letters, 1987
Investigation of parameter sensitivity of short channel mosfets
Solid-State Electronics, 1982