MOS-FET fabrication problems

This publication has 19 references indexed in Scilit:

• Fabrication of planar silicon transistors without photoresist
  Solid-State Electronics, 1968
• Properties of Si[sub x]O[sub y]N[sub z] Films on Si
  Journal of the Electrochemical Society, 1968
• Self-Registered Molybdenum-Gate MOSFET
  Journal of the Electrochemical Society, 1968
• Stabilization of MOS devices
  Solid-State Electronics, 1967
• The effects of fixed bulk charge on the characteristics of metal-oxide-semiconductor transistors
  IEEE Transactions on Electron Devices, 1966
• Characteristics of the metal-Oxide-semiconductor transistors
  IEEE Transactions on Electron Devices, 1964
• Design theory of a surface field-effect transistor
  Solid-State Electronics, 1964
• Work Function, Photoelectric Threshold, and Surface States of Atomically Clean Silicon
  Physical Review B, 1962
• The field-dependence of carrier mobility in silicon and germanium
  Journal of Physics and Chemistry of Solids, 1960
• Contact Potential Difference Measurements by the Kelvin Method
  Proceedings of the Physical Society. Section B, 1957