Ion implantation into three-dimensional structures
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1-4) , 142-147
- https://doi.org/10.1016/0168-583x(87)90813-5
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- A 1-Mbit CMOS DRAM with fast page mode and static column modeIEEE Journal of Solid-State Circuits, 1985