Revised formulae for sputtering data
- 20 January 1995
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 218 (1) , 8-17
- https://doi.org/10.1016/0022-3115(94)00376-9
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Threshold energy for sputtering and its dependence on angle of incidenceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Sputtering studies with the Monte Carlo Program TRIM.SPApplied Physics A, 1984
- A universal relation for the sputtering yield of monatomic solids at normal ion incidenceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Erratum:An analytical formula and important parameters for low-energy ion sputtering [J. Appl. Phys. 51, 2861 (1980)]Journal of Applied Physics, 1981
- A semiempirical formula for the energy dependence of the sputtering yieldRadiation Effects, 1981
- An analytical formula and important parameters for low-energy ion sputteringJournal of Applied Physics, 1980
- Calculations of nuclear stopping, ranges, and straggling in the low-energy regionPhysical Review B, 1977
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Defect distributions in channeling experimentsNuclear Instruments and Methods, 1965
- Eine statistische Methode zur Bestimmung einiger Eigenschaften des Atoms und ihre Anwendung auf die Theorie des periodischen Systems der ElementeThe European Physical Journal A, 1928