Liquid Delivery MOCVD of Ferroelectric PZT
- 1 January 1995
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- MOCVD of BaSrTiO3 for ulsi dramsIntegrated Ferroelectrics, 1995
- Pyroelectric characteristics of a thin PZT (40/60) film on a platinum film for infrared sensorsIntegrated Ferroelectrics, 1995
- Effects of the utilization of a buffer layer on the growth of Pb(Zr, Ti)O3 thin films by metalorganic chemical vapor depositionJournal of Crystal Growth, 1994
- High quality lead zirconate titanate films grown by organometallic chemical vapour depositionIntegrated Ferroelectrics, 1993
- Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1−x)O3, PbTiO3, and ZnO thin filmsJournal of Applied Physics, 1991
- Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric propertiesJournal of Applied Physics, 1989
- Pyroelectric coefficient direct measurement technique and application to a nsec response time detectorFerroelectrics, 1972
- PbO vapour pressure in the Pb(Ti1−x)O3 systemSolid State Communications, 1969