Range Distributions of Low Energy Ions in Silver and Copper

Abstract
Range distributions of 1-5 keV Nitrogen ions in polycrystalline copper and silver substrates are measured and compared with available theories. The distribution consists of a surface localized peak, a shoulder/second peak and a long tail. The shoulder/ second peak and tail are well explained by theories, however, the surface localized peak is a new feature for which several mechanisms have been investigated.